Thermo-optic coefficient of PECVD silicon-rich silicon nitride
نویسندگان
چکیده
منابع مشابه
Optical properties of silicon rich silicon oxides obtained by PECVD
In this work optical properties of SiOX ð0 , X , 2Þ layers obtained by plasma enhanced chemical vapor deposition are studied. Infrared spectra and refractive index dependences with the reactant gases flow ratio R are explained for as deposited, aged and thermally treated samples in the R range from 9.17 to 110. Variations are found to be influenced mainly by sample stoichiometry, density and Si...
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Planar waveguides made of Nd 3+ -doped silicon rich silicon oxide (SRSO) and silicon rich silicon nitride (SRSN) have been fabricated by reactive magnetron sputtering and characterized with special emphasis on the comparison of the guided photoluminescence (PL) properties of these two matrices. Guided fluorescence excited by top surface pumping at 488 nm on planar waveguides was measured as a f...
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ژورنال
عنوان ژورنال: Optics Letters
سال: 2020
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.403357